High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform - Sarveshwar Sharma, Nishant Sirse, Miles M Turner

High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform - Sarveshwar Sharma, Nishant Sirse, Miles M Turner | Arena